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(PDF) Magnetic-free electrical circulator based on AlN MEMS filters and ...
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Figure 10 from Magnet-Less Circulator Using AlN MEMS Filters and CMOS ...
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Figure 1 from Piezoelectric ALN MEMS resonators with high coupling ...
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Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN ...
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Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN ...