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(PDF) Low temperature epitaxy and the importance of moisture control
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Si:P and SiGe:B Dual epitaxy development for 10nm FD-SOI Raised Source ...
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Epitaxy of Emerging Materials and Advanced Heterostructures for ...
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Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in ...
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Plasma-Assisted Halide Vapor Phase Epitaxy for Low Temperature Growth ...
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