The Determined Eepf In 10 Mtorr Argon Discharge Table 5 Describes The
The determined EEPF in 10 mTorr argon discharge. Table 5 describes the ...
The evolution of EEPF in the early afterglow at a pressure of 10 mTorr ...
EEPF in argon ICP measured at 10 mTorr for different frequencies and ...
The EEPF measured in argon for various position along the x-axis. The ...
EEPF, f EEPF in the center of the discharge obtained from the PIC/MCC ...
The EEPF measured in argon for various position along the x-axis. The ...
Changes in the optical emission emanating from the 1 mTorr argon ...
The measured (a) Druyvesteyn EEPF in the smaller ICP at 15 mTorr ...
Parameter dependence of the HEBE in EEPF on the discharge condition ...
Local EDF in argon at E/N = 10 Td (solid lines) and the EDF calculated ...
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EEDF ( f (ε)ε 1/2 dε = 1) in the argon discharge at four phases in the ...
EEPF for various concentrations of argon and chlorine at 10 mTorr and ...
The electron energy probability function (EEPF) in the discharge center ...
EEPF results of the argon dataset with VBI configured to determine an ...
The EEPF versus electron energy for discharge power of 12.5, 50 and 200 ...
The evolution of the EEPF against the substrate bias voltage in the ...
The EEPF for five simulated gas mixtures at p ϭ 200 mTorr and ␥ ϭ 0 ...
(a) EEDF and (b) EEPF of sample data for 0.1 and 1 mTorr plasmas. The ...
Plasma properties predicted by the model for the ICP sustained in argon ...
Pressure dependencies of EEDFs in the 500-MHz discharge for 50 V/cm at ...
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The EEPFs measured in the middle of the discharge at different time ...
The EEPF in the center of a DF parallel plate capacitively coupled ...
EEPF evolution with the driving frequency x=2p at the discharge voltage ...
The EEDFs before and after RF compensation in low-density plasma; argon ...
( a ) Temporal evolution of the EEPF in a dusty argon–silane plasma ...
EEPF evolution with the driving frequency x=2p at the discharge voltage ...
The electron temperature determined at the end of the HiPIMS discharge ...
EEPF in x direction at the center for (A) different lengths (in m) (B ...
Electron energy probability function in the central discharge in the ...
Temporal evolutions of the normalized EEPFs g EEPF ðeÞ (unit in eV À3/2 ...
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Comparison of different 10 mTorr argon EEPFs. Heavy lines are from ...
EEPFs measured in argon ICP at different discharge power P d = 6.25 ...
Time-averaged EEPFs in similar discharge cases with k ¼ 1, 5, and 10 ...
The temporally averaged electron energy probability function (EEPF) in ...
EEPF results of the helium–argon dataset with VBI configured to ...
͑ Color online ͒ The EEPF for various times from initiating the pulse ...