Concentration Profiles Of O Ta And Si In 15 Nm Ta 2 O 5 On Si Before
Concentration profiles of O, Ta and Si in 15 nm Ta 2 O 5 on Si before ...
AES depth profiles of the Ta 2 O 5 /RuO 2 films deposited on the Si ...
a) XPS depth profiles of O, Ag, Ta and Cu in the Ag (10 nm)/Ta 2 O 5 ...
a) XPS depth profiles of O, Ag, Ta and Cu in the Ag (10 nm)/Ta 2 O 5 ...
AFM images of Ta 2 O 5 thin films grown on Si substrate at different ...
Nd, Ta, and Si concentration profiles for a 1.0 wt.% Nd O-doped Ta O ...
͑ a ͒ SIMS depth profiles of O elements in Ta 2 O 5 /Al/Ta/Cu samples ...
Molar concentration profiles of O and Si in SiO2 layers measured by ...
Thickness and Ta concentration profile in crystalline Nb 2 O 5-Ta 2 O 5 ...
Concentration dependences of Ta 2 O 5 solubility in aqueous solutions ...
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(a) and (b) Partial and total density of states in pristine Ta 2 O 5 ...
XRD θ − 2θ scans of O-Ta 2 Si films deposited on p-type silicon. Ta 2 O ...
͑ a ͒ SIMS depth profiles of O elements in the Ta 2 O 5 /Ta/Cu/Ta ...
(a) HAADF STEM image of the 5 nm Ta 2 O 5 device stack. (b) EDX maps ...
ToF-SIMS depth profiles of: (a) pure Ta 2 O 5 and surface doped Ta 2 O ...
Gate leakage current of Ta 2 O 5 and SiO 2 MOSFET's. The lower leakage ...
ToF-SIMS depth profiles of: (a) pure Ta 2 O 5 and surface doped Ta 2 O ...
Properties of Ta 2 S 5 , Ta 2 O 5 , and Ta 2 O 5−x S x wires. (a) EDS ...
Medium energy ion scattering depth profiles for a thin 7 nm Ta 2 O 5 ...
(a) Capacitance-voltage curves of the Ta 2 O 5 -Al 2 O 3 system and (b ...
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Sputter depth profiling of Ta 2 O 5 showing the Ta 4f 7/2 and 4f 5/2 ...
CVs for deposition of copper on Ta with a Ta 2 O 5 oxide layer ...
Density and number density of Ta 2 O 5 and SiO 2 – Ta 2 O 5 ...
Gate leakage current of Ta 2 O 5 and SiO 2 MOSFET's. The lower leakage ...
shows the AES of a Ta 2 O 5 ALD film with thickness of 33nm on Si/SiO 2 ...
Figure 1 from The electrostatics of Ta 2 O 5 in Si-based metal oxide ...
PL spectra of as-deposited Ta 2 O 5 (Ox) (a), Ta 2 O 5 grown on ...
(a) The waveguide illustrations and SEM images of Ta 2 O 5 channel ...
Leakage current of Ta 2 O 5 (sample 3) and conventional gate ...
PL spectra of as-deposited Ta 2 O 5 (Ox) (a), Ta 2 O 5 grown on ...
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Band structure of (a) pristine Ta 2 O 5 , (b) 8.3%W, (c) 25%W, and (d ...
(a) HAADF STEM image of the 5 nm Ta 2 O 5 device stack. (b) EDX maps ...
Relation between the molar concentration of Ta 2 O 5 (x), the elastic ...
(a) Cross section TEM micrograph of a 6.1 nm Ta 2 O 5 /4.5 nm SiO 2 ...
(Color online) Sputtering yields of Ta, TaN, and Ta 2 O 5 by (a) Ar þ ...
(Color online) Sputtering yields of Ta, TaN, and Ta 2 O 5 by (a) Ar þ ...